Ultraclean Technology Handbook. Vol 1 (Record no. 8615)
| 000 -LEADER | |
|---|---|
| fixed length control field | 00483 a2200169 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0824787536 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 670.42 |
| Item number | OHM |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Ohmi, Tadahiro |
| Dates associated with a name | |
| 245 ## - TITLE STATEMENT | |
| Title | Ultraclean Technology Handbook. Vol 1 |
| Remainder of title | Ultrapure Water |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | Marcel Dekker, Inc. |
| Date of publication, distribution, etc | OHM 1993 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xvi, 928p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | ULSI Manufacturing |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Ultralarge-Scale Integration |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Manufacturing Process |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Ultraclean Technology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Ultrapure Water |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Cental Instituite of Fisheries Education | Cental Instituite of Fisheries Education | 03/22/2012 | R-670.42 OHM | 16133 | 03/22/2012 | 03/22/2012 | Reference Books |