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Ultraclean Technology Handbook. Vol 1

Ohmi, Tadahiro

Ultraclean Technology Handbook. Vol 1 Ultrapure Water - New York Marcel Dekker, Inc. OHM 1993 - xvi, 928p.

ISBN: 0824787536

Subjects--Topical Terms:
ULSI Manufacturing
Ultralarge-Scale Integration
Manufacturing Process
Ultraclean Technology
Ultrapure Water

Dewey Class. No.: 670.42 / OHM

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