TY  - GEN
AU  - Ohmi, Tadahiro
TI  - Ultraclean Technology Handbook. Vol 1: Ultrapure Water
SN  - 0824787536
U1  - 670.42 
PY  - 1993///
CY  - New York
PB  - Marcel Dekker, Inc.
KW  - ULSI Manufacturing
KW  - Ultralarge-Scale Integration
KW  - Manufacturing Process
KW  - Ultraclean Technology
KW  - Ultrapure Water
ER  -